We Make Ultra-Precision Equipment for Higher Efficiency in Optics & Semiconductors Manufacturing
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JRZN-100 Advanced Robotic Polishing System
I. Feature
Built on a high-precision and stable industrial robot motion platform, equipped with a high-precision force-controlled polishing head, and integrated with special CNC optical processing software, this robotic polishing system delivers outstanding processing capabilities. It enables high-precision polishing for various optical components including large-aperture flat, spherical, aspherical, and free-form surfaces.
The system is widely applicable to materials such as K9 glass, quartz, ULE, glass-ceramic, monocrystalline silicon, silicon carbide, sapphire, ceramic (semiconductor material), and metals like copper, aluminum, and nickel.
Various polishing heads are available including small-tool polishing head and airbag polishing head. They support rapid removal of surface damage layers after grinding, fast form-correction polishing, smoothing polishing, and surface roughness improvement, greatly expanding application scenarios and precision.
II.Main Configuration and Parameters
The high-precision intelligent polishing system mainly includes: high-precision 6-DOF robot, precision force-controlled polishing head, worktable, control cabinet, intelligent polishing process software, polishing fluid circulation system, various polishing tools, protective cover, etc.
III. Main Functions of CNC Optical Processing Software
1.Preprocess test data: surface fitting, tilt removal, data extension, masking, etc.
2.Process measured removal function data.
3.Generate robot raster and spiral paths.
4.Digitally model workpiece surface parameters and contours; support round, elliptical, rectangular, annular, polygonal shapes.
5.Support flat, spherical, asphere, off-axis asphere, XY polynomial freeform surfaces.
6.Fit and calculate surface form from CMM point cloud data.
7.Analyze and process Zygo, 4D interferometer data.
8.Simulate processing results, output simulated surface data, simulate cycle time and convergence efficiency.
9.Store current process parameters and generate process log files.
IV. Dimensions
1.Footprint: 2780(L) × 1200(W) × 2200(H) mm;
2.Total weight: 2.9T;
3.Power: 7KW.
| JRZN-100 Advanced Robotic Polishing System Technical Specifications | |
| Parameter | Technical Specification |
| Model | JRZN-100 |
| Workpiece Aperture | 50mm~1000mm |
| Workpiece Shape | Round/Elliptical/Rectangular/Polygon/Inner Special Hole |
| Workpiece Type | Flat/Spherical/Aspherical/Freeform |
| Processing Accuracy | Flatness RMS ≤7nm / Asphere RMS ≤10nm |
| Surface Roughness | Ra≤1nm |
| Maximal Thickness | ≤500mm |
| Surface Finish | Better than Grade II |
| Main Equipment Configuration & Parameters | ||
| No. | Configuration Item | Technical Index |
| 1 | 6-DOF Robot | ABB robot |
| 2 | Worktable | Table diameter: 1100mm |
| 3 | Precision Force-Controlled Polishing Head | Force output accuracy: ±0.4N Axial output force: 0-125N Position feedback accuracy: 0.1mm Rated speed: 300rpm |
| 4 | Polishing Fluid Circulation System | Polishing fluid stirring, circulation, filtration, with liquid level & temperature monitoring |
| 5 | Small Tool Polishing Module | Grinding & polishing discs: D20mm, D30mm, D40mm, D50mm (one each) |
| 6 | Airbag Polishing Module | Curvature: R10, R20mm, R40mm, R60mm (one each) |
| 7 | Process Software | With process database, free permanent update |
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