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We Make Ultra-Precision Equipment for Higher Efficiency in Optics & Semiconductors Manufacturing

Ultra-precision Dicing Machine Series

Machine Tool Overview

1.This machine is equipped with three high-precision linear guideways and an air-bearing grinding spindle to meet ultra-precision machining requirements.

2.To further ensure motion accuracy and machining stability of the guideways, the machine base is constructed from natural granite, effectively minimizing thermal deformation and environmental temperature influence.

3.In addition, the system is equipped with two high-magnification microscope lenses and a non-contact tool setting device, enabling real-time grinding wheel measurement and in-process product inspection.

4.The production capacity is approximately one 85 × 85 mm glass wafer per hour, or 250 pieces of 5 × 5 mm glass chips per hour.


Technical Specifications
Product Parameter
Product SeriesDicing MachineCutting Machine
ModelUPS-200UPS-150PS-150
Machining RangeSquare 200x200mm, Circular φ200mm(8-inch Plate)Square 150x150mm, Circular φ150mm(6-inch Plate)
Positioning AccuracyX-axis2um/200mm;1um/5mm2um/150mm;1um/5mm5um/150mm;3um/5mm
Y-axis0.5um/200mm;0.3um/5mm0.5um/150mm;0.3um/5mm5um/150mm;3um/5mm
Z-axis2um/35mm;1um/5mm2um/35mm;1um/5mm5um/35mm;3um/5mm
StraightnessX-axis0.3um/200mm;0.05um/5mm0.3um/150mm;0.05um/5mm5um/150mm;3um/5mm
Y-axis0.5um/200mm;0.3um/5mm0.5um/150mm;0.3um/5mm5um/150mm;3um/5mm
Z-axis1um/35mm;0.5um/5mm1um/35mm;0.5um/5mm5um/35mm;3um/5mm
Axis Travel RangeX-axis(mm)460360
Y-axis(mm)210160
Z-axis(mm)3535
T-axis(°)320320320
Cutting StrokeX-axis(mm)200150150
Y-axis(mm)200150150
Cutting SpindleShaft Diameter(mm)φ33φ33φ33
Rotational Speed(rpm)3000-500003000-500003000-50000
Spindle Power(kw)2.22.22.2
Tool Dimensions5"5"5"
Feed RateX-axis(mm/min)600600
Y-axis(mm/min)150150
Z-axis(mm/min)303030
Minimum Setting UnitX-axis(um)0.10.10.1
Y-axis(um)0.010.010.1
Z-axis(um)0.10.10.1
C-axis(deg)0.0010.0010.001
Power SupplyAC380V, Three-Phase Five-Wire System
Dimensions(mm)1250*1090*21331050*890*2133


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Product Parameter
Product SeriesDicing MachineCutting Machine
ModelUPS-200UPS-150PS-150
Machining RangeSquare 200x200mm, Circular φ200mm(8-inch Plate)Square 150x150mm, Circular φ150mm(6-inch Plate)
Positioning AccuracyX-axis2um/200mm;1um/5mm2um/150mm;1um/5mm5um/150mm;3um/5mm
Y-axis0.5um/200mm;0.3um/5mm0.5um/150mm;0.3um/5mm5um/150mm;3um/5mm
Z-axis2um/35mm;1um/5mm2um/35mm;1um/5mm5um/35mm;3um/5mm
StraightnessX-axis0.3um/200mm;0.05um/5mm0.3um/150mm;0.05um/5mm5um/150mm;3um/5mm
Y-axis0.5um/200mm;0.3um/5mm0.5um/150mm;0.3um/5mm5um/150mm;3um/5mm
Z-axis1um/35mm;0.5um/5mm1um/35mm;0.5um/5mm5um/35mm;3um/5mm
Axis Travel RangeX-axis(mm)460360
Y-axis(mm)210160
Z-axis(mm)3535
T-axis(°)320320320
Cutting StrokeX-axis(mm)200150150
Y-axis(mm)200150150
Cutting SpindleShaft Diameter(mm)φ33φ33φ33
Rotational Speed(rpm)3000-500003000-500003000-50000
Spindle Power(kw)2.22.22.2
Tool Dimensions5"5"5"
Feed RateX-axis(mm/min)600600
Y-axis(mm/min)150150
Z-axis(mm/min)303030
Minimum Setting UnitX-axis(um)0.10.10.1
Y-axis(um)0.010.010.1
Z-axis(um)0.10.10.1
C-axis(deg)0.0010.0010.001
Power SupplyAC380V, Three-Phase Five-Wire System
Dimensions(mm)1250*1090*21331050*890*2133


Ji Rui Technology (Guangxi) Co., Ltd.
Ji Rui Technology is a high-tech enterprise specializing in high-end intelligent equipment for precision optics and semiconductors, providing one-stop full-chain process solutions integrating R&D, manufacturing, and global supply.
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