We Make Ultra-Precision Equipment for Higher Efficiency in Optics & Semiconductors Manufacturing
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1.This machine is equipped with three high-precision linear guideways and an air-bearing grinding spindle to meet ultra-precision machining requirements.
2.To further ensure motion accuracy and machining stability of the guideways, the machine base is constructed from natural granite, effectively minimizing thermal deformation and environmental temperature influence.
3.In addition, the system is equipped with two high-magnification microscope lenses and a non-contact tool setting device, enabling real-time grinding wheel measurement and in-process product inspection.
4.The production capacity is approximately one 85 × 85 mm glass wafer per hour, or 250 pieces of 5 × 5 mm glass chips per hour.
| Product Parameter | ||||
| Product Series | Dicing Machine | Cutting Machine | ||
| Model | UPS-200 | UPS-150 | PS-150 | |
| Machining Range | Square 200x200mm, Circular φ200mm(8-inch Plate) | Square 150x150mm, Circular φ150mm(6-inch Plate) | ||
| Positioning Accuracy | X-axis | 2um/200mm;1um/5mm | 2um/150mm;1um/5mm | 5um/150mm;3um/5mm |
| Y-axis | 0.5um/200mm;0.3um/5mm | 0.5um/150mm;0.3um/5mm | 5um/150mm;3um/5mm | |
| Z-axis | 2um/35mm;1um/5mm | 2um/35mm;1um/5mm | 5um/35mm;3um/5mm | |
| Straightness | X-axis | 0.3um/200mm;0.05um/5mm | 0.3um/150mm;0.05um/5mm | 5um/150mm;3um/5mm |
| Y-axis | 0.5um/200mm;0.3um/5mm | 0.5um/150mm;0.3um/5mm | 5um/150mm;3um/5mm | |
| Z-axis | 1um/35mm;0.5um/5mm | 1um/35mm;0.5um/5mm | 5um/35mm;3um/5mm | |
| Axis Travel Range | X-axis(mm) | 460 | 360 | |
| Y-axis(mm) | 210 | 160 | ||
| Z-axis(mm) | 35 | 35 | ||
| T-axis(°) | 320 | 320 | 320 | |
| Cutting Stroke | X-axis(mm) | 200 | 150 | 150 |
| Y-axis(mm) | 200 | 150 | 150 | |
| Cutting Spindle | Shaft Diameter(mm) | φ33 | φ33 | φ33 |
| Rotational Speed(rpm) | 3000-50000 | 3000-50000 | 3000-50000 | |
| Spindle Power(kw) | 2.2 | 2.2 | 2.2 | |
| Tool Dimensions | 5" | 5" | 5" | |
| Feed Rate | X-axis(mm/min) | 600 | 600 | |
| Y-axis(mm/min) | 150 | 150 | ||
| Z-axis(mm/min) | 30 | 30 | 30 | |
| Minimum Setting Unit | X-axis(um) | 0.1 | 0.1 | 0.1 |
| Y-axis(um) | 0.01 | 0.01 | 0.1 | |
| Z-axis(um) | 0.1 | 0.1 | 0.1 | |
| C-axis(deg) | 0.001 | 0.001 | 0.001 | |
| Power Supply | AC380V, Three-Phase Five-Wire System | |||
| Dimensions(mm) | 1250*1090*2133 | 1050*890*2133 | ||
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